3D Magnetron Sputtering PVD Coating System For SEM Sample Preparation
Model: ZK-JS04-DC Ion Sputtering Coater
| Parameter | Specification |
|---|---|
| Target Materials | Standard: Au (Gold), 57mm diameter × 0.1mm thick Optional: Pt (Platinum) |
| Standard Sample Holder | Holds 12 SEM stubs, height adjustment range: 60mm |
| Rotating/Tilting Stage (Optional) | Rotation: 0-60 rpm (adjustable); Tilt: -90° to +90° (adjustable) Platform: 40mm diameter (holds 4 sample holders) |
| Sputtering Current | 5-30mA (microprocessor-controlled, programmable) |
| Meters | Vacuum: Atm - 1×10-3 mbar; Current: 0-99mA |
| Control Method | Microprocessor with Start/Pause; Programmable time (1-999s); Auto-pumping/venting |
| Vacuum System | Pumping speed: 133 L/min; Ultimate vacuum: 10-4 mbar; Noise: 56 dB |
Adjustable sputtering current and optional rotating/tilting stage enable uniform thin-film deposition for diverse sample geometries. Dual locking mechanism ensures stability.
Gold (Au) and Platinum (Pt) targets ensure high-purity conductive coatings essential for high-resolution SEM and analytical applications.
Programmable controls and auto-venting enhance efficiency and safety, making it ideal for busy laboratory environments.
Features a stainless steel chamber with a large observation window and a low-noise design (56 dB) for a comfortable working environment.
Ideal Applications: SEM sample preparation, thin-film deposition research, multi-sample processing (up to 12 stubs), and angle-dependent deposition.




