1 / 5
Model: JY-JS02 - Cold Magnetron Sputtering Deposition System
The JY-JS02 is a benchtop cold magnetron sputtering coating system equipped with a standard rotating/tilting sample stage. It is specifically designed for high-quality conductive coating of non-conductive samples with varied surface morphologies for SEM imaging. It also meets the requirements for electrode coating, semiconductor materials, and other thin-film applications.
| Parameter | Specification |
|---|---|
| Target Material | Standard: Pt (57mm diameter × 0.1mm thickness); Optional: Au, Au/Pd, Pt/Pd |
| Sample Stage Rotation | 0-60 rpm (continuously adjustable) |
| Sample Stage Tilt | -45° to +45° (continuously adjustable) |
| Stage Diameter | 40mm (holds 4 standard sample holders; custom sizes available) |
| Sputtering Current | Microprocessor-controlled (0-99 mA) with safety interlock |
| Vacuum Range | Atm ~3 Pa |
| Control Method | Programmable (1-999s) with Start/Pause buttons; automatic pumping/sputtering/venting |
| Parameter | Specification |
|---|---|
| Pumping Speed | 133 L/min |
| Ultimate Vacuum | 0.05 Pa |
| Noise Level | 56 dB |